Custom Slit Valve (Semiconductor Parts)
High-performance Slit Valve Rubber Seals for Semiconductor Equipment
A slit valve sits at the entrance of a vacuum chamber in semiconductor equipment and controls wafer transfer and gas flow in and out of the chamber. Its rubber seal keeps the chamber under vacuum, preventing outside air from entering and process gases from leaking. NIYOK develops custom slit valve seals for semiconductor tools and machine components to your drawing and process conditions.
Product Material
Slit valve seals must hold vacuum while exposed to process gases and repeated door cycles. The compound is selected for process chemistry, temperature and outgassing requirements.
FKM (Fluoroelastomer): excellent resistance to high temperature, fuels and aggressive fluids; standard range −25°C to 250°C.
Please send your process conditions and our engineers will recommend a suitable compound.
Features
- Maintains chamber vacuum during wafer transfer
- Prevents outside air from entering and process gases from leaking
- Developed to customer drawings and process conditions
Specification
- Function: vacuum chamber door (slit valve) seal
- Material: FKM and other compounds selected for the process
- Sizes: made to your drawing or sample
Application Industry
- Semiconductor equipment
- Vacuum systems
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NIYOK Custom Slit Valve (Semiconductor Parts) Service Introduction
Located in Taiwan since 1983, NIYOK SEALING PARTS CO., LTD. is a Custom Slit Valve (Semiconductor Parts) supplier and manufacturer with more than 43 years of experence in the Seal Industry.
With over 40 years of experience, NIYOK has been a specialist manufacturer of seals and oil seals From oil seals, O-rings, to gaskets, and customized products, application industries include manufacturing, chemical processing, defense, water treatment and filtration, hydraulics, fluid power, heavy trucks, automobiles, aerospace, oil and gas, medical and For life sciences, food and beverages, a complete product line is available for customer needs and specifications.
NIYOK has been offering customers high-quality Custom Slit Valve (Semiconductor Parts) production service, both with advanced technology and 43 years of experience, NIYOK ensures each customer's demands are met.






